BSE Pressure MEMS – Performance Under Pressure
BSE Zeus for Pressure MEMS
- x1 to x8 test sites
- Index time as low as 650ms
- Pressure ranges from negative atmosphere to 10 bar standard (up to 70 bar available as an option)
- Temperature range of -55C to +155C
- LN2 or mechanical refrigeration
BSE Pressure MEMS Advantages
Direct Pressure
The Zeus MEMS solution is fully integrated within the handler. No need to hand off to another unit to stimulate the MEMS device.
High Productivity
Fast index and quick transition between pressures allow you to process more parts through your test cell.
Cost Effective
Packed full of capability with the lowest cost of test.
Performance
Designed for MEMS and parametric testing in a single pass within the handler.
Package Flexibility
Easily handles packages with multiple ports under differential stimuli.
Test Site Compatibility
Easily integrated with your existing tester interfaces.
Reliable
Simplified application of the pressure stimulus, leads to increased uptime.
Temperature
Full tri-temp capability to meet the requirements of automotive and medical applications.
Pressure Applications
| Low Pressure (vacuum) | up to 3 psia / 200 mbar |
| Low Pressure (barometric) | 0, 9 & 18 inches of H2O |
| High Pressure (automotive) | up to 145 psia / 10 bar (up to 70 bar available as an option) |
| Slew Rate | 1000ms between set points (application dependent) |
| Test Pressure Set Points | 4 user selectable pressures |
| Pressure Accuracy | Up to 0.02% of full scale (application dependent) |
| Pressure Verification | Leak test verification prior to every test. Closed loop feedback from each site is available as an option |